TurboQ S

Automated turbo pumped sputter coater

In February 2025, Quorum launched a completely new range of sputter coaters, incorporating advanced features to meet users’ needs.

The TurboQ S is a secondary vacuum sputter coater primarily used to prepare samples for scanning electron microscopy (SEM). A redesign of the vacuum system makes it ideal for applications requiring high vacuum and high grain fineness, particularly for very high resolution requirements. The TurboQ S achieves a vacuum set point of 1×10^-6 mbar, measured with a hybrid gauge combining Pirani and Penning technologies.

The TurboQ S makes sputtering of noble or oxidizing metals easy and effective. Accessible to both new and experienced users, it features pre-recorded protocols and an intuitive control screen to make it easy to use.

Its sample holder is height adjustable and tiltable to ensure uniform deposition, even for complex 3D structures.

Its magnetron head and deposition modes reduce sample heating, allowing heat-sensitive samples to be processed.

A dedicated thickness control allows the system to stop deposition when the desired thickness is reached.

Equipped with a turbomolecular pump in the chassis, the TurboQ S can achieve an optimum operating vacuum of 10^-6 mbar, allowing, among other things, very fine sputtering of oxidizing metals (Cu, Cr, W, Al…) suitable for ultra-high resolution imaging, with an adjustable current from 1 to 150 mA.

Vacuum sequences are automatic and start when the system is switched on, without operator intervention, helping to preserve valves and extend equipment life.

The TurboQ is also available in a carbon coater version (TurboQ E) or a combined version (TurboQ ES).