SU8700
Ultra-High Resolution Field Emission Scanning Electron Microscope
The SU8700 brings in a new era of Ultrahigh-resolution Schottky field emission scanning electron microscopes to the long-standing Hitachi EM line-up.
The SU8700 hot cathode FEG HR SEM can be configured with or without the variable pressure mode.
The electronic column is equipped with a booster and several complementary electron detectors. The guaranteed resolution is sub-nano metric from 1kV to 30kV.
The SU8700 hot cathode FEG HR SEM is scalable to suit a variety of laboratory needs. The maximum probe current can be in excess of 200nA and is infinitely variable over the entire available range. The chamber is cleverly designed to accommodate a large number of additional devices simultaneously including airlock, EDS, WDS, EBSD and Cryo stage.
Features and variations
- Guaranteed on-site resolution: 0.8nm at 15kV; 0.9nm at 1kV
- Hot emission (Schottky type)
- Acceleration voltage: 0.5kV to 30kV
- Booster applicable over the whole range of acceleration voltages
- Landing energy from 10eV
- Continuously adjustable probe current to over 200nA (high vacuum and variable pressure modes)
- Chamber pressure range: 5Pa to 300Pa
- Samples up to 200mm diameter
- Optional sample introduction lock
- Integrated Navigation Camera