RotaQ ES

Automated rotary pumped sputter and carbon coater

In February 2025, Quorum launched a completely new range of sputter coaters, incorporating advanced features to meet users’ needs.

The RotaQ ES is a primary vacuum system primarily used to prepare samples for scanning electron microscopy (SEM). It allows the sputtering of noble metals and the evaporation of carbon, thanks to two interchangeable deposition heads that can be installed in less than ten seconds.

Accessible to both new and experienced users, it features pre-recorded protocols and an intuitive control screen to make it easy to use. The system automatically detects which deposition head is installed and adjusts settings and protocols accordingly.

Its sample holder is height adjustable and tiltable to ensure uniform deposition, even for complex 3D structures.

Its magnetron head and deposition modes reduce sample heating, allowing heat-sensitive samples to be processed.

A dedicated thickness control allows the system to stop deposition when the desired thickness is reached.

The RotaQ ES can achieve a vacuum of 10^-4 mbar with an adjustable current of up to 150mA for sputtering and up to 75A for carbon evaporation. Vacuum sequences are automatic and start when the system is switched on, without operator intervention, helping to preserve valves and extend equipment life.

The RotaQ is also available in a sputter coater version (RotaQ S) or a carbon coater version (RotaQ E).