GV10x Plasma Cleaner

The IBSS Group’s GV10x Downstream Plasma Asher process of producing plasma at low pressure is proven to be an inspired improvement beyond the traditional methods of mitigating contamination using cold trapping, nitrogen purging and other type plasma cleaners.

The GV10x, with its extended operating parameter; power, up to 100 Watts, and pressure 2 to <0.5 E-3 Torr represents a paradgim shift of carbon mitigation in SEM, FIBs and other vacuum chambers were low carbon levels are required.

Plasma’s of atomic oxygen and atomic hydrogen oxide or reduce hydrocarbon contamination by converting surface carbons into gas phase module which are pumped out of chamber, not just immobilized on trapping surfaces.

Sample artifacts from polymerized deposits are minimised by low carbon levels in SEM chambers.