SU5000
Field emission & variable pressure scanning electron microscope
The Hitachi SU5000 hot cathode field effect SEM combines the advantages of variable pressure and high resolution.
Its analytical chamber allows the simultaneous adaptation of a wide range of equipment including EDS, WDS, EBSD and Cathodoluminescence.
Features and variations
- Guaranteed resolution: 1.2 nm at 30kV / secondary vacuum
- Guaranteed resolution: 3 nm at 15 kV / primary vacuum
- Schottky emission
- Probe current: up to 200nA
- Acceleration voltage: 0.1kV to 30kV (optional)
- Chamber pressure range: up to 300 Pa
- High displacement eucentric sample stage, motorised in all five axes
- SE, BSE and UVD detectors*, In-Lens (optional)