RotaQ S

Automated rotary pumped sputter coater

The RotaQ S is a primary vacuum system primarily used to prepare samples for scanning electron microscopy (SEM).

With the RotaQ S, noble metals can be sputtered easily and efficiently. Accessible to both new and experienced users, it features pre-recorded protocols and an intuitive control screen to make it easy to use.

Its sample holder is height adjustable and tiltable to ensure uniform deposition, even for complex 3D structures.

The magnetron head reduces sample heating, allowing heat-sensitive samples to be processed.

A dedicated thickness control allows the system to stop deposition when the desired thickness is reached.

The RotaQ S can achieve a vacuum of 10^-4 mbar with an adjustable current of up to 150mA. Vacuum sequences are automatic and start when the system is switched on, without operator intervention, helping to preserve valves and extend equipment life.

The RotaQ is also available in a carbon coater version (RotaQ E) or a combined version (RotaQ ES).