Rigaku XTRAIA XD-3300
Automatic thin film composition and crystallinity detection system
This product is available from Milexia France
The XTRAIA XD-3300 The XTRAIA XD-3300 is a versatile X-ray metrology tool that enables non-destructive analysis of single-layer and multi-layer films on 300 mm and 200 mm wafers, both smooth and structured, with high throughput for high-volume production.
Measurement results include film thickness, density and roughness (by X-ray reflectometry, XRR), as well as the thickness, composition, stress, lattice relaxation and crystalline structure quality of the epitaxial film (by high-resolution X-ray diffraction, HRXRD).
Key features
- High-intensity incident X-ray beam with a beam size of up to 40 µm
- Compatible with 8-inch and 12-inch wafers
- 2D detector for highly accurate data acquisition