NX-2000 Focused Icon Beam System
FIP-SEM for large samples up to 200mm
FIB-SEM systems have become an indispensable tool for characterization and analysis of the latest technologies and high performance nano-scale materials.
An ever-increasing demand for ultrathin TEM lamellas without artifacts during FIB processing require the best in ion and electron optics technologies.
The HITACHI Focused Icon Beam System (FIB) NX-2000 is equipped with three guns. The high current density ion column (up to 100nA) is vertical. The ultra-high resolution electron column has a new generation cold emission gun allowing observation of the thinned area in real time. A third gun emitting Argon ions considerably reduces the radiation damage usually seen with Gallium ions.
The 200mm X 200mm travel stage, the patented “Micro Sampling” device and multiple gas injection possibilities complete the features of the Hitachi NX2000 FIB.
FIB column
- Resolution (SIM): 4 nm 30 kV, 60 nm 2 kV
- Accelerating voltage: 0,5 kV – 30 kV
- Beam current: 0,05 pA – 100 nA
- Max. beam current density: 54 A/cm2
- Aperture: Automated – 15 positions
- Min. dwell time: 10 ns
FE-SEM column
- Resolution: 2,8 nm 5 kV, 3,5 nm 1kV
- Accelerating voltage: 0,5 kV – 30 kV
- Electron source: Cold cathode field emission source
- Real-time monitoring: Optics enabled for live fabrication
- Detector
- Standard detector: Upper/Lower SED & BSED
Stage
- X: 0-205 mm
- Y: 0-205 mm
- Z: 0-10 mm
- θ: 0-360° continuous
- γ: -5 – 60°
Features and variations
- Ar/Xe ion 3rd column
- Micro-sampling system
- Multi-gas injection system.
- Swing function (for Ar/Xe ion 3rd column)
- TEM sample preparation wizard
- Automatic TEM sample prepartion software
- CAD navigation software
- Linkage software with defect inspection instruments
- EDS (Energy Dispersive X-Ray Spectroscopy) system
- Plasma cleaner
Características
- Columna 3.ª de iones Ar/Xe
- Sistema de micro-muestreo
- Sistema de inyección de gas múltiple
- Función de oscilación (para la 3.ª columna de iones Ar/Xe)
- Asistente para preparación de muestras TEM
- Software automático de preparación de muestras TEM
- Software de navegación CAD
- Software de enlace con instrumentos de inspección de defectos
- Sistema EDS (Espectroscopía de Rayos X de Energía Dispersiva)
- Limpiador de plasma