FineSAT 7

The FineSAT 7 is the latest generation of scanning acoustic microscope from Hitachi Power Solutions. It offers unrivalled image quality and can inspect large samples up to 300mm in diameter.

• Improved accuracy with better image quality
• Larger water tank: can inspect samples up to 300mm in diameter in a single pass
• Improved performance and productivity
• Speeds of up to 1200mm/s
• Compliance with Semiconductor Equipment and Materials International (SEMI) safety standard

Hitachi Power Solutions (2966 employees) is the world leader in the acoustic microscopy market with more than 2600 units installed worldwide.

Hitachi Power Solutions has been operating since 1983, mainly in Asia until now, and is now introducing the ‘FineSAT 7’ model to meet the needs of the European and American markets.

The FineSAT 7 is a Scanning Acoustic Microscope (SAM), also known as Scanning Acoustic Tomography (SAT). It can detect and image tiny structures and defects such as delamination and voids inside semiconductors and electronic components non-destructively using the reflection and transmission properties of ultrasonic waves.

The FineSAT 7 offers improved image quality and greater accuracy for internal defect detection, improving efficiency and productivity. It is equipped with a newly developed in-house A/D board with an integrated FPGA to achieve 16 times better resolution* and twice the measurement time*. High-frequency signals are more easily detected.

With its enlarged water tank, it is now possible to insert samples up to 300mm in diameter. The displacement and measurement range has been extended. The probe that transmits and receives the ultrasonic waves has also been improved. The bubbles that cause the ultrasonic waves to reflect can now be easily eliminated.

The ‘through transmission’ method used for complex shapes such as multi-layer devices contributes to the improved efficiency.

A wide range of probes (up to 400MHz) developed and produced by Hitachi Power Solutions means that the possibilities offered by the technique can be perfectly adapted to the different materials and dimensions required.

Thanks to its performance and functions, the FineSAT7 helps to improve the accuracy and productivity of inspections in research, development and manufacturing.

*compared to the conventional FineSAT III model