Quorum Q150T Plus Series

The Quorum Q150T Plus is optimised for use with a turbomolecular pump, which gives a lower vacuum down to 5×10-5 mbar.

This enables the sputtering of oxidising metals, which have a lower grain size suitable for high-resolution imaging.

Similarly, lower scattering allows for high purity, amorphous carbon films of high density.

The Q150T Plus is available in three configurations:

Q150T S Plus – An automatic sputter coater for non-oxidising metals. Sputtering targets include Cr, Ir, W, ITO, Al – other targets available

Q150T E Plus – An automatic carbon coater (rod/cord) for SEM applications. Suitable for EDS and WDS. Metal evaporation/ aperture cleaning option available.

Q150T ES Plus – A combined system capable of both sputtering and carbon coating. The deposition head inserts can be swapped in seconds. Metal evaporation/aperture cleaning
option available.