FlexSEM1000 II
Compact Scanning Electron Microscope
The third generation HITACHI compact SEM, model FlexSEM1000 II, is the successor to the SU1510 and FlexSEM1000.
The FlexSEM1000 II is a versatile scanning electron microscope that can be used as a tabletop SEM or as a conventional SEM.
- The new UVD-II detector, specific to the “variable pressure” or “low vacuum” mode, has a 50% improved signal-to-noise ratio and produces very fine topographic images.
In high vacuum mode, the UVD-II detector can be used as a cathodoluminescence detector. It complements the standard Everhart-Thornley Secondary Electron (SE) and 5-segment High Sensitivity Backscatter Electron (BSE) detectors.
The camera navigation system provides an optical colour view of the sample, making it easy to identify the precise areas to be observed under the electron beam.A high-performance 3D image reconstruction software, developed in collaboration with the company Digital Surf, provides quantitative information on the roughness of the sample and its surface characteristics.
Features and variations
- High performance and easy to use
- Guaranteed resolution at 20KV: 4nm, (SE) and 5nm (BSE),Guaranteed resolution at 1KV : 15nm(SE)
- Magnifications: x6 to x300,000 continuously
- Accelerating voltage : 0,3kV to 20kV
- Variable pressure range : 6Pa to 100Pa
- Maximum sample size: 80mm diameter and 50mm height
- Moveable on 5 axes, with 3 motorised (X, Y, R)
- EDS analysis working distance: 10mm, T.O.A. : 30°
- Detectors : SE and BSE as standard, and UVD-II optional