The SU9600 represents the new generation of scanning electron microscopes developed by Hitachi High-Tech.

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The SU9600 represents the new generation of scanning electron microscopes developed by Hitachi High-Tech.

Designed to deliver sub-nanometer precision STEM imaging, it meets the growing demands of the semiconductor industry, advanced materials research, and cutting-edge scientific studies, where miniaturization and reliability of analysis are essential.

Thanks to its unique combination of exclusive technologies, advanced automation, and high-throughput data acquisition, the SU9600 enables faster, more stable, and higher performance imaging while ensuring exceptional image quality.

Extreme precision thanks to the cold field emission electron gun

The SU9600 is equipped with Hitachi’s exclusive CFE electron gun, providing:

  • An ultra-stable and bright electron beam, ensuring sub-nanometer resolution:
  • 0.4 nm in secondary electrons (30 kV)
  • 1.0 nm in secondary electrons (1 kV)
  • 0.34 nm in STEM mode (30 kV)
  • Immediate usability upon startup
  • Sharp, high-contrast images with excellent signal-to-noise ratio (S/N)
  • Long continuous acquisition capability, essential for high-resolution analysis

With its optimized architecture, the SU9600 achieves world-class imaging performance.

Advanced automation for high-throughput analysis

The SU9600 incorporates automation features that allow operators to:

  • Standardize and simplify workflows
  • Accelerate large-scale data collection
  • Reduce manual adjustments
  • Improve reproducibility and result quality

It thus becomes an essential tool for productivity-driven environments, particularly in R&D and process control.

Advanced options and technologies

To address the most demanding applications, the SU9600 can be equipped with state-of-the-art modules:

  • 4D STEM: multidimensional acquisition for detailed structural analysis
  • EELS (Electron Energy Loss Spectroscopy): high-precision chemical and electronic analysis
  • Double-tilt sample holder: ideal for examining complex or oriented samples

These options significantly extend the capabilities of the SU9600, making it a highly versatile instrument for the most demanding laboratories.

Full integration in the Lumada 3.0 digital ecosystem

The SU9600 is fully aligned with Hitachi High-Tech’s digital vision.
Through its integration with Lumada 3.0 via the HMAX for Industry digital service, it becomes a true digital asset capable of:

  • Generating and transmitting reliable large-scale data
  • Combining measurements, domain expertise, and AI
  • Optimizing analytical processes
  • Accelerating development cycles
  • Strengthening scientific and industrial innovation

This integration enables researchers and industry professionals to maximize the value of their data and accelerate innovation.

SU9600 at a glance

  • Sub-nanometer resolution for the most advanced applications
  • Stable, bright, high-contrast imaging
  • Advanced automation for superior analysis throughput
  • Powerful technological options: 4D STEM, EELS, and more
  • Digital integration for data management and value creation
  • Ideal performance for semiconductors, advanced materials, and academic research